Application of piezoelectric actuator in series nano-positioning stage
نویسندگان
چکیده
منابع مشابه
High speed nano-scale positioning using a piezoelectric tube actuator with active shunt control
Piezoelectric tube scanners are the actuators of choice in scanning probe microscopy. These nanopositioners exhibit a dominant first resonant mode that is excited due to harmonics of the input scan signal. This introduces errors in the scan obtained. The presence of this resonant mode limits the upper bound of a triangular scan rate to around 1/100th of the first mechanical resonance frequency....
متن کاملNano-positioning of a slender body using thermal actuator
Current rapid development in MEMS area has opened up many possibilities in nano-technology such as nano-fabrication. Among them is nanoscale wiring by both AFM (Atomic Force Microscope) tip and laser beam. Being able to make a relatively small deflection, a micro thermal actuator can be used to control the near field optics of the beam minutely and accurately. In this project, we will investiga...
متن کاملLEAD-FREE BNKT PIEZOELECTRIC ACTUATOR
An actuator is a device that converts input energy into mechanical energy. According to various types of input energy, various actuators have been advanced. Displacement in the electromagnetic, hydraulic and pneumatic actuators achieve by moving a piston via electromagnetic force or pressure, however the piezoelectric actuator (piezoceramic plates) displace directly. Therefore, accuracy and spe...
متن کاملDesign and Analysis of 5-DOF Micro/nano-Positioning Stage
This paper provided a design method for configuration synthesis of micro/nano-positioning stage with bridge-type mechanism based on graph theory. The structural characteristics of stage were discussed first. Then, these modules made up of micro/nano-positioning stage were abstracted. Thus the stage could be described with a tree-graph. According to the spanning tree theory, several possible con...
متن کاملThermal Buckling Analysis of Circular FGM Plate with Actuator/Actuator Piezoelectric Layer Based on Neutral Plane
In this paper, the thermal buckling analysis of a circular plate made of FGM materials with actuator/actuator piezoelectric layers based on neutral plane, classical plate theory and first order shear deformation plate theory is investigated. Reddy's model is assumed for material properties of FGM plate. Plate under the thermal loading, nonlinear temperature rise through the thickness and clampe...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Science Progress
سال: 2019
ISSN: 0036-8504,2047-7163
DOI: 10.1177/0036850419892190